O-doped Sb materials for improved thermal stability and high-speed phase change memory application

 O-doped Sb materials for improved thermal stability and high-speed phase change memory application

摘要：

The amorphous-to-crystalline transition was investigated by insitu film resistance measurements under an Ar atmosphere. Thesample temperature was measured by a Pt-100 thermocouplelocated at a heating stage controlled by a TP 94 temperaturecontroller (Linkam Scientific Instruments Ltd., Surrey, UK). Thephase structures of the films annealed at various temperatureswere examined by XRD analyses using Cu Karadiation in the 2qrange from 20
to 60
, with a scanning step of 0.01
. A picosecondlaser pump-probe system was used for real-time reflectivity measurement. The light source used for irradiating the samples was afrequency-doubled model-locked neodymium yttrium aluminumgarnet laser operating at 532 nm wave-length with a pulse durationof 30 ps? The surface roughness of the film was evaluated by atomicforce microscopy (AFM, FM-Nanoview 1000), which was carriedout in the semi-contact mode.

作者：

Yifeng Hu , Xiaoqin Zhu , Hua Zou , Long Zheng , Sannian Song , Zhitang Song

期刊：

Journal of Alloys and Compounds 696 (2017) 150-154